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MEMSnet Home: MEMS-Talk: Dicing problem
Plastic vendor
2002-08-29
LSWANG
Dicing problem
2002-09-01
Xiaoshan Zhu
2002-09-03
[email protected]
Dicing problem
Xiaoshan Zhu
2002-09-01
Hi, there,

I have one 100um-wide eletrode (formed by 100 A Ti/ 1500 A Au)  on Si wafer,
but a dcing line is crossing this electrode. If I dice the wafer with a
25um-thcik blade, is it possible to damage the electrode, say, metal peeling
off ??

Hope your reply!

Thanks!

Zhu







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