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MEMSnet Home: MEMS-Talk: Polyimide for plannarization
Polyimide for plannarization
2002-09-09
Zhimin J Yao
2002-09-11
White, Robert C
Polyimide for plannarization
White, Robert C
2002-09-11
you would do best to talk directly with Craig Shuckert of HDMicrosystems,
Wilmington DE

if you cant find it, let me know and I will send his contact info

Robb

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Please note the change in email address shown below.
Use the email address below for all correspondence.
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Robb White
Chief Scientist, Technology Development Laboratories
Science Applications International Corporation (SAIC)
1710 SAIC Dr., MS 2-3-1
McLean, VA 22102

Phone: 703-676-6384
Fax: 703-676-5509
email: [email protected]


-----Original Message-----
From: Zhimin J Yao [mailto:[email protected]]
Sent: Monday, September 09, 2002 3:48 PM
To: [email protected]
Subject: [mems-talk] Polyimide for plannarization


Hello,

I need a polyimide that has a better than 50% degree of plannarization,
about 3 microns thick.  Wet etchable preferred.  Can anyone tell me where I
can find it?  I have checked HDmicrosystem's web page.

Thanks,
Z. Jamie Yao


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