A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etching of gaas native oxide
Etching of gaas native oxide
2002-09-10
Fabio Altomare
2002-09-11
Robert C Cole
2002-09-11
Fabio Altomare
Etching of gaas native oxide
Fabio Altomare
2002-09-11
Mr Cole,
 thanks a lot for your answer. I'm already using a similar solution, but I
need to contain tha amount of AlGaAs oxide etched. Since HCl doesn't
etch GaAs but etches  AlAs I believe the it will also attack the AlGaAs oxide
more than the GaAs oxide. Unfortunately, for my application, the amount of
AlGaAs etched must be below 5 nanometer, that is why I'm looking for some
solution which will attack only the GaAs oxide and not the AlGaAs.
Thanks for your suggestion

 Fabio Altomare


On Wed, 11 Sep 2002, Robert C Cole wrote:

>
> I believe a 10 % solution of HCl will etch the native oxide on GaAs.
>
> Bob Cole
> The Aerospace Corporation
>
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
University Wafer
Process Variations in Microsystems Manufacturing
MEMS Technology Review