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MEMSnet Home: MEMS-Talk: RE: SU-8 adhesion with metal
RE: SU-8 adhesion with metal
2002-09-17
Runkel, Frank
RE: SU-8 adhesion with metal
Runkel, Frank
2002-09-17
Dear Bo Li,

please contact microresist technology in Berlin, Germany:

http://www.microresist.de

They are offering SU-8 resist as well as process technology and did a lot of
research in SU-8 adhesion problems.

Best Regards,

Frank.

--------------------------------------------
SUSS MicroTec
Applications Center Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon     +49 89 32007 - 302
Fax     +49 89 32007 - 390
email   [email protected]


> --__--__--
>
> Message: 3
> From: "bo li" 
> To: 
> Date: Sat, 14 Sep 2002 22:22:41 -0400
> Subject: [mems-talk] SU-8 adhesion with metal
> Reply-To: [email protected]
>
> Dear sir:
>
> I try to pattern su-8 layer on a metal seed layer as the electroplating
> mold. But the adhesion between these is not good. Is anyone know how to
> deal with this? Can you give me some information.
>
> Thanks
>
> BO LI
>
>
>
>

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