Dear MEMS-talk community members,

I was wondering if anybody is familiar with Matrimid 5218 or Probimide 200
Series (formerly XU-218) manufactured by Ciba-Geigy and its interaction with
G-line sensitive resists. According to the manufacturer Matrimid 5218 is
used as a passivation coating, interlayer dielectric, etc.

Does anybody have an experience working with this material? Did anybody
apply G-line resists onto a Matrimid layer?

I appreciate any information.
Thanks a lot,


Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: [email protected]