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MEMSnet Home: MEMS-Talk: residue after etching doped oxide
residue after etching doped oxide
2002-09-17
Yahong Yao
2002-09-18
Robert C Cole
2002-09-18
[email protected]
residue after etching doped oxide
[email protected]
2002-09-18
If you will run a thermal oxidation step before HF etch this should help
remove the film. Bob Henderson
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