I am trying to get 45° side wall angles in KOH etched cavities (silicon
substrates). I am aware of some etching work that has been performed on 100 Si
wafers. I am rather looking for wafers that are sawn in a 9° angle respective to
100. I found several sources for different angles, which are unfortunately too
far away from my 9°. Does anybody have wafers with an angle close to 9° or know
of a potential supplier? Any response is very much appreciated.

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Matthias Heschel, PhD
VP Engineering

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