Virginia Semiconductor does weird wafers (www.virginiasemi.com).  They list
their stock on their home page, and I believe they keep ingots on hand so
they can custom slice things for you.

Bear in mind that with a wafer as you describe, the bottom of the etch pit
will not be flat or parallel to the wafer surface.

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Matthias Heschel
Sent: Thursday, September 19, 2002 6:39 AM
To: [email protected]
Subject: [mems-talk] Si wafers with special surface orientation


I am trying to get 45° side wall angles in KOH etched cavities (silicon
substrates). I am aware of some etching work that has been performed on 100
Si wafers. I am rather looking for wafers that are sawn in a 9° angle
respective to 100. I found several sources for different angles, which are
unfortunately too far away from my 9°. Does anybody have wafers with an
angle close to 9° or know of a potential supplier? Any response is very much
appreciated.

*************************************************************************
Matthias Heschel, PhD
VP Engineering

Hymite ApS, DTU, Bldg. 325, 1st floor
2800 Kgs. Lygnby, Denmark

Direct: +45 45259155
Cell: +45 22723365
Fax: +45 45259156

Email: [email protected]
http://www.hymite.com


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