>
> I am trying to get 45° side wall angles in KOH etched
> cavities (silicon substrates). I am aware of some etching
> work that has been performed on 100 Si wafers. I am rather
> looking for wafers that are sawn in a 9° angle respective to
> 100. I found several sources for different angles, which are
> unfortunately too far away from my 9°. Does anybody have
> wafers with an angle close to 9° or know of a potential
> supplier? Any response is very much appreciated.
>

If a U.S. supplier is OK, Virginia Semiconductor seems to have some off axis
(8°) double side polished wafers in stock:
www.virginiasemi.com/shop.cfm

Bill Eaton, Ph.D.
Materials & Analysis Manager
NP Photonics
5706 Corsa Avenue, Suite 100
Westlake Village, CA  91362
Voice:  (818) 991-7044 x211
eFax:   (503) 214-5559
mailto://[email protected]
www.parvenutech.com