> I am trying to get 45° side wall angles in KOH etched
> cavities (silicon substrates). I am aware of some etching
> work that has been performed on 100 Si wafers. I am rather
> looking for wafers that are sawn in a 9° angle respective to
> 100. I found several sources for different angles, which are
> unfortunately too far away from my 9°. Does anybody have
> wafers with an angle close to 9° or know of a potential
> supplier? Any response is very much appreciated.
> **************************************************************
> Matthias Heschel, PhD

In the paper
Carola Strandnam et al.,
"Fabrication of 45-Degree Mirrors Together with
Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon,"
JMEMS, vol. 4, no. 4, Dec. 1995, pp. 213-219,
they used 9-degree off-axis wafers supplied by Virginia Semiconductor,
Fredericksburg, VA, USA (540) 373-2900; www.virginiasemi.com

        --Kirt Williams Agilent Technologies