Daer Dr. Heschel,
I often have customers that are in need of specific off angle silicon
silices and we are able to process to virtually any range desired
including 9 degree with fairly tight tolerances.
Although I do not handle etching cavities and I could be mistaken, I
have process a number of requests for a 9.7 degree off angle that users
suggest is best for the 45 degree sidewall.
Please contact me via email or other- off list to follow up on your
request.
Best Regards,
Ken Smith
Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742 U S A
510-714-5055 Efax- 510-217-4421 or 561-658-6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.Quartz, Glass, Pyrex
and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.
Matthias Heschel wrote:
> I am trying to get 45° side wall angles in KOH etched cavities (silicon
substrates). I am aware of some etching work that has been performed on 100 Si
wafers. I am rather looking for wafers that are sawn in a 9° angle respective to
100. I found several sources for different angles, which are unfortunately too
far away from my 9°. Does anybody have wafers with an angle close to 9° or know
of a potential supplier? Any response is very much appreciated.
>
> *************************************************************************
> Matthias Heschel, PhD
> VP Engineering
>
> Hymite ApS, DTU, Bldg. 325, 1st floor
> 2800 Kgs. Lygnby, Denmark
>
> Direct: +45 45259155
> Cell: +45 22723365
> Fax: +45 45259156
>
> Email: [email protected]
> http://www.hymite.com
>
>
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