Phil,

We use a modified Summa Clean on silicon wafers.
Modified by adding some HF - don't ask why ....

al

Message: 4
Date: Thu, 19 Sep 2002 15:18:11 +0100
From: [email protected]
To: [email protected]
Subject: [mems-talk] request for info on a mystery clean
Reply-To: [email protected]

Dear Mems Enthusists,
             Has anyone 'out there' used a cleaning solution called 'SUMMA
Clean', perhaps on
II-IV compound semiconductors?

If so, please can you let me know, together, perhaps, with its PH Value.

Thanks.

Regards,

Phil