I want to make an array of holes in glass:
100 x 100 holes, 100 um diameter, 150 um pitch.
Accuracy of both diameter and pitch should be
<100 nm !!!

At this moment I have two ideas for making them:
1) microhole drilling using lasers
Does anyone have experience with this technique,
is it possible to achieve a high accuracy ? Does
anyone know of any other technique to make such
holes ?

2) Moulding glass on a silicon mould
The ideas is to make pillars in Silicon using
dry etching and then 'moulding', or spinning a
thick 'liquid glass' on the sample. Afterwards the
Si can be removed with a selective etch.
Can anyone give me some info on ultra-thick
spin on glass, Glass resins, Glass moulding or
any other technique to deposit the 200 um thick
glass layer on my Silicon mould ?


With regards,

Arjan van Zuuk

MAPPER Lithography BV
Lorentzweg 1
2628 CJ  DELFT
The Netherlands
email: [email protected]
http://www.mapperlithography.com

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