On Thu, Feb 15, 1996 9:26:57 PM at [email protected] wrote:
>It would help to know the dimensions of the trench, i.e. width, depth,
sidewall
>angle. I've been patterning PR on wafers with 20 micron wide koh etched
v-grooves
>for a while now. I might have a few suggestions.
>
>jonathan simon
>UCLA MAE dept.
>
>
For example: (110) wafer, vertical sidewall, 100 m wide trench, 500 m deep. I
will appreciate any advice you have to offer!

Perry