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MEMSnet Home: MEMS-Talk: Silver Dry Etch
Silver Dry Etch
2002-09-26
Jean Tokarz
2002-09-27
Greg Mattiussi
Silver Dry Etch
Jean Tokarz
2002-09-26
I am looking to see if there is anyone familiar with a dry etch for Silver. I
have done a lot of research on this but cannot seem to find anything concrete.
Can anyone refer some papers or give any suggestions? Thank you.

*Jean

-----------------------------------------------------
Jean Tokarz
Process Engineer
VI Microsystems
Phone: 352-372-0440
Fax: 352-372-7609

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