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MEMSnet Home: MEMS-Talk: LTO on Au
LTO on Au
2002-09-30
Xing Yang
2002-10-01
Rob Davis
LTO on Au
Xing Yang
2002-09-30
I am looking for LTO deposition service on wafers with patterned Au
structures. Since Au is a contamination for IC processes, most of
the foundry places I have contacted in US do not allow wafers with Au
to go into their furnaces. I wonder if anyone knows places that could
do such a process for a small quantity of wafers. I am open to suggestions
in Europe and Japan too.

Thanks.

Xing Yang




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