hello

I am a rookie in MEMS and eager to ask you all to do me a favor !
I need a special etchant recipe for etching ZnO thin film(~4.5 um) which bottom
is patterned by Al(~0.5 um). The etchant I need should etch ZnO ONLY but not the
Al electrode! I really need your help, please...:)

Best Regards
mikoyan