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MEMSnet Home: MEMS-Talk: Etch Selectivity to Mo and Al
Etch Selectivity to Mo and Al
2002-10-04
Manish Kothari
Etch Selectivity to Mo and Al
Manish Kothari
2002-10-04
Hi,

I am looking for an etchant that etches Moly and stops
on Aluminum, and an etchant that etches Al and stops
on Moly. Developer would work for the later but I am
looking for other options.

Thanks.

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