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MEMSnet Home: MEMS-Talk: thick aluminum film on wafers
thick aluminum film on wafers
2002-10-07
[email protected]
2002-10-08
Neal Ricks
2002-10-08
Michele Migliuolo
2002-10-08
Renie Duvall
thick aluminum film on wafers
Michele Migliuolo
2002-10-08
Tim:

we can offer sputtered films from 6" targets. What is your substrate and its
size? How many substrates do you wish to process? The real issue with Al is
stress in the film and the fact that it tends to peel off. We'd be happy to give
it a try if you wish.

With best regards

Michele Migliuolo
Verimetra, Inc.

 >>  Hi all.  I am trying to find a company that either supplies silicon wafers
 >>
 >>  coated with a thick film of aluminum (2-10 micron) or one that will do
 >>  electroplating and chemical-mechanical polishing to achieve a thick
 >>  aluminum
 >>  film with surface roughness minimized.  All the aluminum plated wafers
 >>  I've
 >>  found have had very thin films (>  Thank you.
 >>  Tim



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