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MEMSnet Home: MEMS-Talk: an etchant for ZnO
an etchant for ZnO
2002-10-08
kubit
an etchant for ZnO
kubit
2002-10-08
Hello:
I just have my first acoustic transducer designed in this week.The main
actuating section is a ZnO thin film which bottom is patterned by Al.The etchant
for ZnO troubles me a lot, that's because this specific etchnat I want most
should not attack Al film at all.Could anyone please provide this recipe for me?
mikoyan

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