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MEMSnet Home: MEMS-Talk: 3D electrostatic-structural simulation
3D electrostatic-structural simulation
2002-10-08
yong zhu
UV-ozone versus O2 plasma
2002-10-09
X. Yuan
3D electrostatic-structural simulation
yong zhu
2002-10-08
Dear All,

I am modelling and simulating the suspended membrane
conductor on top of the bottom fixed electrode with
ANSYS 6.1. I use shell element to model the membrane
and solid element for the air gap. But I don't know
how to apply the Maxwell surface flag manually and
don't know how to determine its value.

If you have any experience with this situation, please
give me some recommendations.

Many thanks in advance for your help!

Yong

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