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MEMSnet Home: MEMS-Talk: stiction of contacting surfaces
stiction of contacting surfaces
2002-10-10
[email protected]
2002-10-11
thomas knieling
2002-10-24
Bill Moffat
2002-10-25
[email protected]
stiction of contacting surfaces
thomas knieling
2002-10-11
Hi Wenlin,
there has been published some literature on this topic, especially by Roya
Maboudian (Univ. of Berkeley) and M. de Boer (www.sandia.gov). In general the
surface has to be exposed to a halogenized alkylsilane like FDTS (supplier:
www.abcr.de), which forms a hydrophobical monolayer on the surface.

Regards,
Thomas

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