Dear Wenlin,
mainly the stiction comes from dry process. water capillary force may draw beam
towards substrate and other forces like van der waals or surface tension
developed.
the solutions might be heat up when you dry it, or use solution such as IPA to
lower the surface tension, XeF2 or CO2 for supercritical sublimation, or simply
modify your layout structures for anti stiction.
good luck.

Inst. of MEMS, NTHU


Message: 8
To: [email protected]
From: [email protected]
Date: Thu, 10 Oct 2002 09:58:02 -0400
Subject: [mems-talk] stiction of contacting surfaces
Reply-To: [email protected]

Hello:

I'm working on electrostatic curved beams.   It has been observed that
after certain cycles of operation, stiction of the beam to substrate
occurs. I'm wondering if there are researches done on the mechanism of the
stiction and how it can be avoided. Any information will be appreciated.

Best regard

Wenlin Jin