Hello everybody
    Does anybody have some experience with the etching of strontium
titanate (e.g. wet etching or RIE recepies, whether the etch can be
anisotropic, what would be the best etchant, which rate is expected).
    Thanks
    Sergei

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Sergei V. Kalinin,
Oak Ridge National Laboratory,
1 Bethel Valley Rd,
Bldg. 3025, MS6030,
Oak Ridge, TN 37831
Phone: (865) 241-0236
FAX: (865) 574-4143