A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Young modulus value of heavily-(p)doped Silicon
Young modulus value of heavily-(p)doped Silicon
2002-10-17
Liviu NICU
2002-10-17
[email protected]
Young modulus value of heavily-(p)doped Silicon
Liviu NICU
2002-10-17
Hello everybody.

I would like to know if the p-doping of bulk Si could significatively change its
Young modulus. I've heard, for instance, that the Young modulus could be of
about 130GPa (instead of 170GPa) in the <100> direction but it seems to be a
little bit exaggerated.

Has anybody ever determined the Young modulus value for 10ohm*cm (p) doped
Silicon?

Thank you for your help,

Liviu



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
Addison Engineering
Mentor Graphics Corporation