Hi,
I wonder if somebody can suggest any etchants that
etch PECVD Si-N, but do not etch or etch very slowly
alumina coating. Thanks in advance for your help

Honggang Jiang
Second Sight, LLC
28460 Avenue Stanford, Suite 200
Valencia, California 91355
Ph: 661 775 3990
Fx: 661 775 3989

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