I've tried laser printed transparencies for making iron oxide masks. The
dot structure of the laser toner shows up in the mask. I have purchased
photoplots on mylar for around 100 bucks and the edges are very good when
the iron oxide mask is developed. The resolution is good down to linewidths
of about 20 microns or so. You can plot several masks per page if you are
using smaller wafers, so you can get several masks from the photoplot. Look
up the Photoplot Store on the internet.
Good luck,
Marty
Message: 8
Date: Tue, 22 Oct 2002 10:28:37 -0700 (PDT)
From: Soojin Oh
To: [email protected]
Subject: [mems-talk] low resolution photomask printer
Reply-To: [email protected]
When making low resolution photomask by printing on
transparency, do the printing companies use special
printers? Also are the transparent films special kind?