Hello,
1/To measure the reverse piezoelectric coeffience d33 of "a layer" you
have
to make a sandwich of it, between two elctectods on a thick substrate (2mm)
you can apply a AC voltage (frequency f0) to the layer and you measure the
displasment of the top surface with a calibrated AFM or interferometer. For
the AFM method, you have to use the A-B signal from the photodetector with
the frequency f0, ie filtered with an lock-in amplifier.
2/It exists a methode to measure the direct piezoelectric coefficient
e31
on which you collect the charges created by the piezo on the electrode
during the vibration on a cantilever covered with the piezoelectric
material.
Here are some refs to help you on points 1/ A-L Kholin et al. Rev Sci
Instrum Vol 67 No 5 May 1996 1935
M-A Dubois et
al, Appl Phys Lett, Vol 89, No 11 (2001) 6389
C-M Lueng et al
J Appl Phys, Vol 88, No 9 (2000) 5360
J-A Christman et
al App Phys Lett, Vol73, No 26 (1998) 3851
2/ E Cattan et
al, Sensors and Actuators 74 (1999) 60
B Jaber et al,
Sensors and Actuators A 63 (1997) 91
J-F Shepard Jr
et al, Sensors and Actuators A 71 (1998) 133
Best
regards,
Vincent Mortet
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Xiaoqin Huang
Sent: woensdag 23 oktober 2002 19:56
To: [email protected]
Subject: [mems-talk] Piezoelectricity Measurement
Hi all,
I am planning to measure the piezoelectricity of ZnO, but I just know a
bit about this kind of measurement. If you are familiar with this
measurement, please give me some suggestions. Thank you very much.
Jenny X. Huang
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