Xiaoshan,

I am sorry to tell you that PMMA will not respond to wavelengths above 250 nm.
In fact, it's sensitivity is highest at 220 nm. It is, of course, mostly used
for e-beam or x-ray lithography.

Very Best Regards,
Rob Hardman
617-965-5511 ext.313
[email protected]

www.microchem.com



essage: 8

From: "Xiaoshan Zhu" 

To: 

Date: Wed, 23 Oct 2002 22:12:41 -0600

Subject: [mems-talk] PMMA probelm

Reply-To: [email protected]

Hi, there,

I'd process PMMA (less than 200nm thickness), but I have no Deep UV (~250nm)
source. For such a PMMA thickness, is it feasible to just use usual UV source(
360nm~410nm) to do exposure?

Hope your reply!

Thanks a lot!

Xiaoshan