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MEMSnet Home: MEMS-Talk: Diffusion barrier for Cr/Au or Ti/Au
Diffusion barrier for Cr/Au or Ti/Au
2002-10-22
Xing Yang
2002-10-23
Neal Ricks
2002-10-23
Simone Capecchi
2002-10-24
Niels Olij
2002-10-24
lakshmikanth namburi
Diffusion barrier for Cr/Au or Ti/Au
lakshmikanth namburi
2002-10-24
1000A Tantalum would be a good barrier for Au. Of all the barriers that I tried,
Ta, Ti,TiW,
NiV,Cr, I found Ta to be the best. You can also look at the data for diffusion
coefficients of
different metals into Au at different temperatures and find out what would work
best for you.
Lakshmikanth Namburi.
Process Engineer,
Teravicta Technologies Inc.
Austin TX.


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