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MEMSnet Home: MEMS-Talk: using bcb after shelf life has expired
using bcb after shelf life has expired
2002-10-24
Lester López
using bcb after shelf life has expired
Lester López
2002-10-24
I am currently using Cyclotene's 3022-63 resin and I am experiencing "pits"
underneath the metal whenever I try to pattern metal lines underneath a 10
micron bcb layer.

I remember when we got the resin for the first time I did not have this problem
and I am wondering if it may be related to an expired shelf life.

Can anybody share some input?

thanks in advance,

Lester López
Research Assistant
Microwave and Wireless Research Group
University of South Florida
4202 East Fowler Avenue, ENB 118
Tampa, Florida 33620
PH: 813-974-4851
FAX: 813-974-5250
Email: [email protected]

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