Hi,

I need some help, regarding fabrication of ZnO/AlN layer on the surface of a
metal electrode which is in contact with silicon substrate. I need to
deposit aluminum nitride on silicon wafer or silicon oxide, which ever has
better adhesion properties with AlN/ZnO. Before depositng AlN/ZnO on silicon
wafer, i need a layer of compatible metal with it and to pattern it
accordingly. Can you suggest something, like the condition of sputtering,
type of chemicals that can be used to etch AlN /ZnOafter patterning etc
I will be very grateful for your help.
Thanks
Priyanka


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