Yanjun:



You should post this question to [email protected]  .  I
administered this list for some time and there should also be a great deal
of information in the archives.  Jason Cleveland at Asylum Research is a
leading expert on this topic as well. 805-685-7077



Regards -Monte





Reply-To: [email protected]



>Hi,folks

I'm trying to measure the mechanical properties of silicon dioxide
microcantilever, such as spring constant, resonant frequency, etc. The
geometry of cantilever is about 200*150*1micron. Do you have suggestions
about how to do the job? What kinds of instruments are needed?  I heard that
AFM can be used to measure. I just don't know how? Any opinions will be
appreciated. Thanks.



Best regards



Yanjun(David) Tang



Graduate student

Institute for Micromanufacturing

 Monteith G. Heaton
VP Marketing and Sales

Innovative Micro Technology
75 Robin Hill Road * Santa Barbara, CA  93117
Ph:  805-681-2852 * Fx:  805-967-2677
[email protected]   * www.imtmems.com

_________________________________________
"Your strategic partner for MEMS design and 6" wafer
manufacturing services with 0.35µm photolithography,
30,000 sq. ft. fab, and non-CMOS materials flexibility,
including metals/magnetics."