A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Bonding Si to Si
Bonding Si to Si
2002-10-31
Josef Kouba
2002-11-01
CLIF HAMEL
2002-11-01
Luesebrink Helge
2002-11-01
Jeff Birkmeyer
2002-11-01
Kenneth Smith
2002-11-04
Josef Kouba
Bonding material impervious to KOH bath
2002-11-02
[email protected]
2002-11-04
Atzmon Ofri
Bonding Si to Si
Josef Kouba
2002-10-31
Hi all MEMS talk members,

can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.

Thanks for your help

Best Regards

Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
Nano-Master, Inc.
The Branford Group