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MEMSnet Home: MEMS-Talk: Bonding material impervious to KOH bath
Bonding Si to Si
2002-10-31
Josef Kouba
2002-11-01
CLIF HAMEL
2002-11-01
Luesebrink Helge
2002-11-01
Jeff Birkmeyer
2002-11-01
Kenneth Smith
2002-11-04
Josef Kouba
Bonding material impervious to KOH bath
2002-11-02
[email protected]
2002-11-04
Atzmon Ofri
Bonding material impervious to KOH bath
[email protected]
2002-11-02
Are there materials that can used for wafer bonding
that doesn't get etched/stripped in KOH bath? I've
already tried Apiezon black wax, crystal bond, SU-8
(not fully crossed), but they all seems to not work
quite well. I would appreciate any advice.
Thanks,
Kevin


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