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MEMSnet Home: MEMS-Talk: Bonding Si to Si
Bonding Si to Si
2002-10-31
Josef Kouba
2002-11-01
CLIF HAMEL
2002-11-01
Luesebrink Helge
2002-11-01
Jeff Birkmeyer
2002-11-01
Kenneth Smith
2002-11-04
Josef Kouba
Bonding material impervious to KOH bath
2002-11-02
[email protected]
2002-11-04
Atzmon Ofri
Bonding Si to Si
Atzmon Ofri
2002-11-04
Dear Ken Smith

Can you send us all this contact point?

Best
Atzmon Ofri- TeraOp Inc.

-----Original Message-----
From: Kenneth Smith [mailto:[email protected]]
Sent: Friday, November 01, 2002 9:52 PM
To: [email protected]
Subject: Re: [mems-talk] Bonding Si to Si


Jeff, The burden is yours, not the forums- there is a delete key on your
computer - last time I checked mine... as this topic that is relavent to
many MEMS users and research entities and better to ask the  voice of
experience rather than fall to the prey of those that think they know.

Josef,
I have a contact that you can call about this- he has current experience
with both anodic  ( no oxide) and fusion ( with Si02) . The process to
set either solution up is quite cost effective and simple with the right
tools.

Regards,
Ken Smith

Jeff Birkmeyer wrote:

> Josef,
>
> Why don't you try a google search before you burden this forum with
> questions like this.  There is a ton of info on this out there.
>
> Regards,
>
> Jeff
>
> -----Original Message-----
> From: Josef Kouba [mailto:[email protected]]
> Sent: Thursday, October 31, 2002 11:18 AM
> To: 'MEMS talk'
> Subject: [mems-talk] Bonding Si to Si
>
>
> Hi all MEMS talk members,
>
> can anybody give me some advise how to bond two silicon wafers together?
> Do I need some special wafers for it or can I use common wafers? I would
> also appreciate any reliable and good information source about this
> problem.
>
> Thanks for your help
>
> Best Regards
>
> Josef Kouba
> Louisiana State University
> Center foot Advanced Microstructures & Devices
> 6980 Jefferson Hwy.
> Baton Rouge, LA 70806, USA
> (225) 578-9371 - Tel.
> (225) 578-6954 - Fax.
>
>
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> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
>


--


Kmbh Associates
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High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
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