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MEMSnet Home: MEMS-Talk: Information on ZEP
Information on ZEP
2002-11-12
Jean Tokarz
Information on ZEP
Jean Tokarz
2002-11-12
Does anyone know the refractive index for ZEP-7000 or where I can get that
information. We are trying to get some information on this resist, so any
good papers would also be great. I haven't found much on ZEP besides the
fact that it has good resistance for Dry Etching as well. Can anyone help?

Thank you,
*Jean Tokarz





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