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MEMSnet Home: MEMS-Talk: KOH
KOH
2002-11-18
jafar j babaei
2002-11-18
bille@npphotonics (Bill Eaton)
microlithography process database
2002-11-18
Nicholas Fang
KOH
bille@npphotonics (Bill Eaton)
2002-11-18
>
> I am going to purchase a wet bench for KOH etching. Please
> recommend a vendor if you have experienced such a wet bench?
>

There are a great number of options for KOH etch tanks, depending on your
budget and timeframe.

A lot of folks use a beaker and a hotplate.

One step up from this is a water circulator. You get these from vendors of
lab equipment. They precisely control the temperature of a water bath. I've
had good luck with these coupled with stainless steel etch tanks purchased
from a restaurant supply store.

One step up from a circulator is a wet-bench etch tank. There are probably
lots of used tanks on the market these days. I don't know what kinds of
linings are available, but something impervious to KOH would be nice. Quartz
will etch at a finite (though small) rate in KOH. If TeflonĀ® is available,
go for that.

Bill Eaton, Ph.D.
Materials & Analysis Manager
NP Photonics
5706 Corsa Avenue, Suite 100
Westlake Village, CA  91362
Voice:  (818) 991-7044 x211
eFax:   (503) 214-5559
mailto://[email protected]




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