A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: query on wet etch of TiW in H202
query on wet etch of TiW in H202
2002-11-19
Elizabeth.Conway
2002-11-20
Mike Bruner
2002-11-20
[email protected]
query on wet etch of TiW in H202
Elizabeth.Conway
2002-11-19
Hi,
what variables affect TiW etch rate in H202 in addition to temperature and low
rate. The temperature for H202 is set at 50 deg C.  IS there a metallic which
catalyses TiW etch or some other variables which accelerates the etch rate,

Regards,
Liz Conway



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
University Wafer
Harrick Plasma, Inc.