Platinum is a catalyst for the etch.

-----Original Message-----
From: Elizabeth.Conway [mailto:[email protected]]
Sent: Tuesday, November 19, 2002 10:47 AM
To: [email protected]
Subject: [mems-talk] query on wet etch of TiW in H202


Hi,
what variables affect TiW etch rate in H202 in addition to temperature and
low
rate. The temperature for H202 is set at 50 deg C.  IS there a metallic
which
catalyses TiW etch or some other variables which accelerates the etch rate,

Regards,
Liz Conway


_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/


__________________________________________________
The WebShield e500 Appliance has scanned
this email message and attachments for viruses.