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MEMSnet Home: MEMS-Talk: query on wet etch of TiW in H202
query on wet etch of TiW in H202
2002-11-19
Elizabeth.Conway
2002-11-20
Mike Bruner
2002-11-20
[email protected]
query on wet etch of TiW in H202
[email protected]
2002-11-20
You can etch TiW in plasma using fluorine gas such as sf6 or cf4 if you have a
system available. Bob
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