Deal MEMS reserachers:

        I got a problem when peel off PDMS off the Si mold made by DRIE since I
did not treat the mold before pour PDMS on. After that, I tried to use HF to
remove PDMS so that I can use the mold again. But it takes very long and the
cleaning is not complete. Can anybody give some suggestions how to totally
remove the PDMS from the Si mold? Any input is highly appreciated.



Sincerely,

Bo