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MEMSnet Home: MEMS-Talk: How to remove PDMS sticiing to the Si mold etched by DRIE?
How to remove PDMS sticiing to the Si mold etched by DRIE?
2002-11-20
[email protected]
2002-11-20
Hyoung Jin "Joe" Cho
2002-11-20
Christopher Blanford
2002-11-21
Alison Cleary
2002-11-21
Likun Zhu
2002-11-21
Hyoung Jin "Joe" Cho
2002-11-20
Phillipe Tabada
How to remove PDMS sticiing to the Si mold etched by DRIE?
Alison Cleary
2002-11-21
Dear Bo,

I believe that Toluene will dissolve PDMS if you leave it overnight,
although I haven't verified this myself. Maybe someone else out there
can confirm this...

Good luck!
Alison

[email protected] wrote:

>Deal MEMS reserachers:
>
>        I got a problem when peel off PDMS off the Si mold made by DRIE since I
>did not treat the mold before pour PDMS on. After that, I tried to use HF to
>remove PDMS so that I can use the mold again. But it takes very long and the
>cleaning is not complete. Can anybody give some suggestions how to totally
>remove the PDMS from the Si mold? Any input is highly appreciated.
>
>
>
>Sincerely,
>
>Bo
>
>
>
>
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--
Alison Cleary
Bioelectronics Group
Electronics and Electrical Engineering
Oakfield Avenue
University of Glasgow
G12 8LT
Scotland
UK

Phone: +44 (0)141 330 2092





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