PDMS can be removed with chemical solvent.
We have been successful using Dynasolve 210/Dynasolve 218.

Dynaloy, Inc.
PO Box 33609
1910 S. State Av.
Indianapolis, IN 46203
800-669-5709

Sincerely,
______________________________
Hyoung Jin "Joe" Cho, Ph.D.
Assistant Professor
Mechanical, Materials & Aerospace Engineering
University of Central Florida, Orlando, FL 32816-2450
(Office) 407-207-7245
(Fax) 707-202-2978
(Web) http://mmae.ucf.edu/~joecho
(Email)[email protected]
(Email)[email protected]
********NanoFab & BioMEMS********

<<<
(O-O)  o0O  Imagination is more important
(_3_)            than knowledge.
d-v-b              -Albert Einstein




-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of [email protected]
Sent: Wednesday, November 20, 2002 3:52 PM
To: [email protected]
Subject: [mems-talk] How to remove PDMS sticiing to the Si mold etched
by DRIE?


Deal MEMS reserachers:

        I got a problem when peel off PDMS off the Si mold made by DRIE
since I
did not treat the mold before pour PDMS on. After that, I tried to use HF to
remove PDMS so that I can use the mold again. But it takes very long and the
cleaning is not complete. Can anybody give some suggestions how to totally
remove the PDMS from the Si mold? Any input is highly appreciated.



Sincerely,

Bo




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