How to remove PDMS sticiing to the Si mold etched by DRIE?
Likun Zhu
2002-11-21
Try nanostrip.
I used it to remove PDMS.
--- Alison Cleary wrote:
> Dear Bo,
>
> I believe that Toluene will dissolve PDMS if you
> leave it overnight,
> although I haven't verified this myself. Maybe
> someone else out there
> can confirm this...
>
> Good luck!
> Alison
>
> [email protected] wrote:
>
> >Deal MEMS reserachers:
> >
> > I got a problem when peel off PDMS off the
> Si mold made by DRIE since I
> >did not treat the mold before pour PDMS on. After
> that, I tried to use HF to
> >remove PDMS so that I can use the mold again. But
> it takes very long and the
> >cleaning is not complete. Can anybody give some
> suggestions how to totally
> >remove the PDMS from the Si mold? Any input is
> highly appreciated.
> >
> >
> >
> >Sincerely,
> >
> >Bo
> >
> >
> >
> >
> >_______________________________________________
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> >Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> >Visit us at http://www.memsnet.org/
> >
> >
>
> --
> Alison Cleary
> Bioelectronics Group
> Electronics and Electrical Engineering
> Oakfield Avenue
> University of Glasgow
> G12 8LT
> Scotland
> UK
>
> Phone: +44 (0)141 330 2092
>
>
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe
> or change your list
> options, visit
> http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> Visit us at http://www.memsnet.org/
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