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refractive index of silicon nitride
2002-11-22
Brian Semak
refractive index of silicon nitride
Brian Semak
2002-11-22
Hi All

I am loking some data of the dispersion of Si3N4, that is data (a table would be
nice) on the refractive index  n of Si3N4 vs. the wave length found by
spectroscopic ellipsometry. Does anyone know where to find it, or can give me
the data

Kind regards/Med venlig hilsen

Brian S. Semak, M.Sc. Phys.
R&D Engineer
Hermetic Packaging

Hymite A/S
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