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MEMSnet Home: MEMS-Talk: Etching Si with SiO2 as mask
Etching Si with SiO2 as mask
foo foo
2002-11-25



Dear all

I am interested in etching Si with SiO2 as an etch mask. Does anyone know of
a good wet or dry process?

All sugestions are highly apricitated

Patrick

_________________________________________________________________
Planera semestern på MSN http://www.msn.se/resor/default.asp


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