Hi Patrick,
KOH or EDP works very well for wet etching, How ever should you chose EDP be
very careful the fumes are extremely toxic.

Ed Knighton, Process Engineer
Constellation Technology Corp.

> -----Original Message-----
> From: Patrick Carlberg [SMTP:[email protected]]
> Sent: Monday, November 25, 2002 9:48 AM
> To:   [email protected]
> Subject:      [mems-talk] Etching Si with SiO2 as mask
>
> Dear all
>
> I am interesseted in etching Si with SiO2 as an etch mask. Does anyone
> know of a dry or wet etch that can be used?
>
> All comments are highly apriciated
>
> Patrick
>
>
>
>
>
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