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MEMSnet Home: MEMS-Talk: Silicon Nitride on Thin Wafers
Silicon Nitride on Thin Wafers
2002-12-03
Edward Castellana
2002-12-04
Kenneth Smith
Silicon Nitride on Thin Wafers
Edward Castellana
2002-12-03
Hello,

Does anyone know of a company that supplies double side
polished wafers, ~100 um thick silicon, <100> wafers with
silicon nitride on one or both sides.  I have had no luck
finding one.

Thanks,

Ed Castellana
Department of Chemistry
Texas A&M University
College Station TX  77843

979-845-7638

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