Hi Mr.Patrick,

 The KI has a very high etch rate of gold even at room temperature.
Perhaps the overetch time you are giving is sufficient enough to make the
feature edges corrugated(uneven). try reducing the overetch time or
playing with the temperature.

Ravi shankar
Semiconductor Complex Ltd
India

 >
> Date: Tue, 03 Dec 2002 14:47:58 +0000
> From: "foo foo" 
> To: [email protected]
> Subject: [mems-talk] Rough edges in wet etch
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> dear all
>
> I am etching a thin gold layer about 10-30nm thick with a wet etch, KI. I am
> using PMMA polymer as an etch mask. My problem is that I get very rough
 edges, by that I mean uneven edges, on the metal after the etching.
Does
> anyone have any ideas why this happens.
>
> Regards
> Patrick
>
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